Operation process of electron gun evaporation coating
Time：
2023-07-31 09:55
The density of the electron beam emitted by a high-pressure electron gun is very high. If the electron beam landing point is not properly controlled, the electron beam cannot be deflected onto the metal ingot, which may heat the coating chamber wall and other areas. Therefore, it is important to follow the operating sequence of the electron gun.
1) The gun voltage of a general electronic gun is determined, so first turn on the magnetic field power supply and adjust it to the predetermined magnetic field current. Set the magnetic field intensity H to determine the trajectory of the electron beam, ensuring that the deflection radius of the electron beam runs according to the predetermined trajectory, so that the electron beam spot can fall onto the metal ingot inside the collapse.
2) Turn on the high-voltage power supply of the gun, with the gun voltage at the set value. 3) Turn on the tungsten wire heating power and slowly heat the tungsten wire.
4) Gradually increasing the heating current of the tungsten wire, electron beam spots can be seen on the surface of the metal ingot inside the collapse.
5) Increase the filament current to pre melt the metal ingot, and increase the electron beam current to pre melt the metal ingot, and you can see the rolling of the metal liquid. If the beam spot is not at the center of the metal ingot, the magnetic field current can be adjusted to slightly change the deflection radius of the electron beam, so that the electron beam spot falls exactly at the center of the metal ingot.
6) Continue to increase the filament current, increase the electron beam power, and fully pre melt the metal ingot. Then, open the baffle above the collapse, and the evaporated film material flies towards the workpiece to form a film layer.
In the operation of an e-shaped electron gun, if the magnetic field current is not given in advance, the electron beam will not deflect, and it is possible to directly shoot at other places and burn certain components. The purpose of predetermined magnetic field current is to cause the electron beam to deflect according to the predetermined orbit as soon as it comes out.
In order to expand the scope of the electron beam spot, the electron gun power supply is also equipped with an X-Y scanning system to enable the electron beam to scan on the surface of the metal ingot, expand the evaporation area of the metal melting area, increase the amount of Metallicity evaporated, and thus improve the deposition rate.
In the process of industrialization, it is necessary to fix the gun voltage, magnetic field current, tungsten wire heating current, and scanning conditions, as well as ensure a certain temperature and flow rate of cooling water, as well as the heat dissipation of the metal ingot, to ensure the stability of metal evaporation; Otherwise, it is difficult to ensure the repeatability of the film quality, especially when reacting and depositing compound films, the evaporation of metal must be fixed to ensure that the composition of the compound film meets the stoichiometric ratio.
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2026-09-28
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