High frequency discharge in vacuum systems
Time：
2023-07-31 09:55
High frequency discharge is the form of discharge caused by the presence of a high-frequency alternating electric field between two electrons. When an alternating voltage is applied to both ends of the discharge tube, electrons and positive ions in the gas generate additional harmonic vibrations under the action of the alternating electric field. Due to the much larger mass of positive ions than electrons, the amplitude of harmonic vibrations is very small. When the frequency is low and the amplitude of the harmonic vibration is much greater than the distance between the two, the electrons undergo the entire process of collapse, discharge, and extinction in each half cycle, and the discharge situation is the same as that of direct current. When the frequency is high, the amplitude of the harmonic vibration is far less than the distance between the two, and the ionization ability will be greatly enhanced due to the continuous back and forth movement of electrons. Due to the small amplitude of electronic harmonic vibration, the number of electrons entering the electricity will be greatly reduced. This ensures that the electrons of gas self-sustaining discharge will no longer be provided by the Secondary electrons generated by electricity, but by the electrons generated by ionization when the electrons move back and forth. At this time, although a small amount of positive ions and photons bombard electricity to produce Secondary electrons, the vibration direction of Secondary electrons is sometimes the same as the direction of the incoming electron flow, and sometimes the opposite direction, due to the constant changes in the nature of the two electrons. Therefore, it is not conducive to ensuring self-sustaining conditions.
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