Characteristics of Vacuum Evaporation Coating Technology

Time:

2023-07-31 09:54

1. The process of vacuum evaporation coating equipment includes the evaporation of film material, the transmission of vapor atoms in high fidelity air, and the nucleation and growth of vapor atoms on the surface of the workpiece to form a film.
2. The deposition vacuum of vacuum evaporation coating is high, generally between 10-510-3Pa. The free path of gas molecules is on the order of 1-10m, which is much greater than the distance from the evaporation source to the workpiece. This distance is called the evaporation distance, usually 300-800mm. The film particles almost do not collide with gas molecules and vapor atoms, and reach the workpiece directly.
3. The vacuum evaporation coating layer has no coating properties, and vapor atoms are directed directly towards the workpiece under high vacuum. Only the side facing the evaporation source on the workpiece can obtain the film layer, and the side and back of the workpiece can hardly obtain the film layer, resulting in poor coating performance.
4. The energy of particles in the vacuum evaporation coating layer is low, and the energy it reaches the workpiece is the thermal energy carried during evaporation. Since the workpiece is not biased during vacuum evaporation coating, the metal atoms only rely on the Enthalpy of vaporization during evaporation. The evaporation temperature is 1000~2000 ° C, and the energy carried is equivalent to 0.1~0.2eV. Therefore, the energy of the film particles is low, and the adhesion between the film and the substrate is small, so it is difficult to form compound coatings.
5. The structure of the vacuum evaporation coating layer is fine and dense. The vacuum evaporation plating process is formed under high vacuum, and the film particles in the vapor are basically atomic scale, forming small cores on the surface of the workpiece and growing into fine and dense structures.

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