DZS-Optical Coating Machine

Optical coating machine suitable for plating a variety of optical flms. Such as telescope, eye lens, opticallens, cold cup,etc, configuration is different The evaporation source and film thickness instrument, can be plated a variety of film system, metal, oxide, compound and other high melting point film material can be into Line evaporation, and can be plated on the surface of the alass superhard filmm

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DESCRIPTION

Product Information

Mechanical parameters

MODEL	DZS-900	DZS-1200
Vacuum chamber size	ɸ900x1050mm ɸ1200x1250mm
max vacuum degrees	3x10⁻⁴Pa
Restore the vacuum pumping time	No load, pumped by air to 2x10⁻²Pa
Baking system	Top heating mode, PID control, maximum 350℃
Form and power of evaporation source	Resistive evaporation, 2 pairs of water cooled electrodes can hold 2 steam Fazhou, 5KW each	Resistance type evaporation, 4 pairs of water-cooled electrodes can hold 4 evaporation boats, each 5KW
High pressure ion bombardment	DC 3KV,5KW rod cathode used for cleaning the workpiece before coating
Ion source (optional)	5KW Hall ion source, used for coating cleaning or auxiliary coating process, is conducive to improving
Workpiece fixture form	Spherical cap type, simplex disk, rotation 5-30r/min Continuously variable speed	Spherical cap type, three-piece disk, planetary male rotation, 5-30r/min, Continuously variable speed
Working gas charging	Mass flow control instrument
Vacuum measuring system	Digital display composite vacuum gauge
electrical control gear	The post-vacuum system and resistance evaporation are automatically controlled by PLC, and the
installed power	50	70
Floor area (m)	about3.5x3	about4x3.5